Semiconductor AMHS for Scalable, High-Throughput Manufacturing Facility

Summary

A leading semiconductor manufacturer needed to implement an automated material handling system in an operating chip fabrication facility. Goals included reducing wafer transport time, improving tool utilization, minimizing handling risk, and reclaiming cleanroom floor space, all while achieving no production downtime.

DMC was contracted to deliver an overhead automated material handling system (AMHS) based on Rockwell’s intelligent conveyor technology. The client asked DMC to act as the construction manager and deliver a turnkey solution from architectural review through installation, while adhering to SEMI S2, SEMI S8, and NFPA safety standards.

Solution

DMC designed and supplied a dual-building overhead automated material handling system. Included was roughly one-quarter mile of MagneMotion overhead track, with transit lines integrated with overhead storage and lifts.

As the system was installed overhead, DMC completed a full architectural and structural review of two ceiling types separated by a fire door. Custom brackets and attachment systems were engineered to meet load, vibration, and safety requirements in cleanroom environments, and to comply with SEMI standards.

High-throughput vertical lifts

DMC designed custom lifts with moving MagneMotion track segments to elevate carriers from ground level to the overhead system. Each lift is linked to a two-level load-and-unload rack and transports three carriers per cycle, enabling loading of more than 100 boxes per hour.

Wafer boxes are transported overhead to storage areas and to other lifts, greatly decreasing operator interaction and movement throughout the buildings. DMC created sophisticated traffic management logic to orchestrate the movement of both loaded and empty carriers moving through the system.

Software development and commissioning

DMC developed intelligent controls and traffic logic to provide various operating modes, routing scenarios, and carrier states. Emulators were used to test and validate system functionality and to minimize the time from installation to production startup through virtual commissioning.

Inter-building integration with fire safety

The overhead system connected two buildings divided by a firewall. To comply with gas and fire safety requirements, DMC facilitated the construction of a dedicated pathway and the installation of a rolling fire door with UL10(b/c/d) certified fire protection.

To maintain full sealing when the door closes, the MagneMotion track was designed to pivot out of the opening during operation. This solution also required careful mechanical design and tightly integrated control software for safe, reliable operation.

Built for maintainability and growth

Each lift serves as a self-contained hub for logic, communications, and motive power. This modular design allows individual lifts to be serviced without disrupting system throughput. The architecture also allows for future growth with minimal changes to the facilities.

Results

Following the first project phase, the client was able to transport wafers throughout its facility more quickly and with greater reliability. Transit times shrank, tool usage increased, hundreds of wafer boxes were stored off the floor, and the boxes were delivered just-in-time. The overhead AMHS system also bridged cleanroom space between two buildings and readied the facility for future expansion.

The project showcases DMC’s ability to go past conventional systems integration by providing complex, safety-critical, turnkey automation solutions in ultra-demanding semiconductor environments.