Custom PC Desktop Application for Semiconductor Wafer Handling

Summary

DMC developed a custom PC desktop application for semiconductor wafer handling. The custom application leveraged Windows Presentation Framework (WPF), C# coding language, and other communication protocols. The app’s features include automatic and manual control, as well as sequence configuration, and the client gained enhanced visibility and efficient troubleshooting capabilities over a highly complex workflow.

Customer Benefits

Solution

System and Technology Overview

DMC’s client was developing a machine for a custom wafer handling scenario. The machine included a robot for wafer handling, multiple TCP and Serial wafer processing components, customer-specific processing modules, and a Beckhoff PLC. The client needed an application to monitor, maintain, and execute silicon wafer processing jobs.

DMC developed a PC desktop application in Windows Presentation Framework (WPF) that orchestrates wafer handling jobs by sending commands and reading statuses from all the devices in the machine. The application interfaces with the devices over EtherCAT, TCP, and several serial protocols. By using WPF and C# instead of one of the many automation HMI platforms, we were able to fully customize the application’s appearance. This also allowed us to remove the complication of serial port communication and process orchestration from the PLC.

The application allows users to create, delete, and edit jobs; monitor job status, I/O, logs, and alarms; and perform manual commands to each individual device when maintenance is required. The robot’s position on the machine graphic updates live as the robot moves wafers through the process, enhancing user interaction. The job status screen also gives insight into wafer locations and the overall progress.

System Benefits

With an automated workflow, the user is free to focus on other initiatives instead of operational inefficiencies. Real-time monitoring allows users to be proactive instead of reactive in detecting issues. Troubleshooting is streamlined with centralized accessibility to job status, logs, and alarms. This means that problems can be identified and fixed faster and prevented in the future, reducing downtime.

Project Process

During development, DMC tested the application’s orchestrated workflow by simulating device drivers and their state reactions to commands. DMC also conducted numerous remote testing sessions that involved logging into the client’s PC to run the application and validate communication with the devices. Finally, DMC went to the client’s facility to commission and test the application.

Key Technologies

• C#
• Windows Presentation Framework (WPF)
• Communication protocols
  • EtherCAT
  • TCP
  • Serial port communication
• File Transfer Protocol

Conclusion

DMC leveraged our expertise in C#, WPF, and PLC programming to deliver a high-quality application that reduced downtime and increased operational visibility to the client.